29th Materials for Advanced Metallization 2020Scope of the workshop:
29th MAM conference is devoted to research on materials and processes for back and front end of the line, including interconnect and silicide materials. Starting as a workshop on refractory metals and silicides in the 80’s MAM moved towards materials for advanced metallization in 1995. Nowadays, it addresses new challenges in the fields of materials for memories, power electronics, M&NEMS, nanoscale devices…
During MAM2020, a workshop will spotlight quantum devices which are quite demanding in terms of material, integration and characterizations. MAM objective is to provide a forum for open discussions across fundamental and applied sciences and industrial applications dedicated to international material scientists.
The program of the workshop will be only based on invited talks given by scientific and technical leaders in each of the key areas to present the current state-of-the-art and to stimulate technical discussions