Large scale optomechanics and nanoresonator applications.

Dr Sébastien Hentz

Univ. Grenoble Alpes

Sébastien Hentz received his Ph.D. in civil engineering from Univ. Grenoble Alpes, France in 2003. Prior to starting his appointment as scientist at CEA LETI at the end of 2004, he was a post-doctoral fellow at Politecnico di Milano. His first research interests at LETI dealt with the study of non-linearity processes in micro and nanomechanical resonators as well as MEMS-based inertial sensing. These works led to a generic platform for MEMS sensing, currently being transferred to the industry. In parallel, he actively contributed to the development of NEMS at LETI, in particular for chemical sensing. He was visiting scientist at Caltech in 2010-2011 and was the grantee of an ERC Consolidator grant in 2013 about NEMS-based mass spectrometry and optomechanics. He was appointed Director of Research in 2018.


CEA LETI has extensive expertise in silicon nanomechanical resonators for sensing, culminating with the first start-up for chemical sensing with NEMS in 2012. These developments have required large scale technological efforts, as well as fundamental studies like non-linearities and noise processes at the nanoscale, and applied demonstrations. This is the case for, in particular, the development of an efficient system for neutral NEMS-based Mass Spectrometry analysis and the highest molecular mass measured with MS. In the last 6 years, LETI has developed a large scale platform for optomechanical resonators, with the objective to make their use as mainstream as their electrical counterparts. Examples of force, mass, biological sensing will be shown.